| 摘要 |
A method and an apparatus for attaching a film are provided to attach the film to a substrate to have excellent yield. An apparatus for attaching a film includes a substrate standing portion, a front absorption plate(39), an absorption plate(22), an absorption plate standing portion, and a front absorption plate release unit. The substrate standing portion holds the substrate in a standing direction and is slanted against the film. The front absorption plate absorbs and holds a front end of the film. The absorption plate absorbs and holds regions other than the front end of the film. The absorption plate standing portion stands the front absorption plate and the absorption plate. The front absorption plate release unit releases the front absorption plate from the front end of the film. |
