| 摘要 |
PROBLEM TO BE SOLVED: To grow a carbon nanotube under a controlled clean condition of the deposition state of particles and the surface state of a substrate to facilitate the growth control of the carbon nanotube and the electric applications thereof. SOLUTION: The forming apparatus includes a producing means 21 for forming the particles to become a catalyst, a classifier 22 for classifying the produced particles into a prescribed particle diameter, a chamber 23 for depositing the particles on the substrate 20 and a chamber 24 for producing the carbon nanotube using the deposited particles as the catalyst and a series of processes from the production of the particles to the production of the carbon nanotube are carried out under a prescribed atmosphere insulated from the outside air. COPYRIGHT: (C)2006,JPO&NCIPI |
