发明名称 WIRE BONDING APPARATUS, BONDING CONTROL PROGRAM AND BONDING METHDO
摘要 A bonding method involving detection of non-bonding of a bonding wire to a first bonding point, the method including an electrical non-bonding detection step and an optical non-bonding detection step, wherein data on whether the respective first bonding points are predetermined bonding points where an electrical non-bonding detection is not applicable are acquired from a memory unit; and when it is determined that a first bonding point is the predetermined bonding point, a non-bonding verification on the first bonding point is executed in the optical non-bonding detection step, and when the first bonding point is not the predetermined bonding point, then non-bonding detection on the first bonding point is executed in the electrical non-bonding detection step.
申请公布号 KR100841263(B1) 申请公布日期 2008.06.25
申请号 KR20060104771 申请日期 2006.10.27
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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