| 摘要 |
A method of forming an oxide-based nano-structured material by growing a nano-structured material using a nano-nucleus having the same composition as the desired oxide-based nano-structured material. A solution is coated on a substrate by dipping, spin or spray coating. The solution includes an organic precursor containing a transition metal or a semi metal and an organic solvent in which the organic precursor is dissolved. A metal oxide nano-nucleus is then formed on the substrate by annealing the substrate. A metal oxide nano-structured material is formed by growing the nano-nucleus while supplying a reaction precursor containing the same metal as the formed oxide into the nano-nucleus. Methods used for this step include PVD, CVD and sol gel processes. The nano-structured material is finally annealed. The structure can be used in an electronic device such as a diode, a display, FET, SET or a battery. |
