| 摘要 |
PROBLEM TO BE SOLVED: To attempt to stabilize the quality of a substrate having a fine concavo-convex pattern on a front surface, and to further enable the wall thinning and miniaturation. SOLUTION: A flat plate workpiece having a smooth resin surface on at least one side surface is used. A micromachining method comprises the steps of pressurizing the concavo-convex pattern of a transfer member to the resin surface of the workpiece in the state that at least one of the transfer member or the workpiece formed with the concavo-convex pattern on the front surface is raised at its temperature by heating during a die operating step until the die for punching this workpiece in a predetermined shape returns to an initial position through the punching position from the initial position, and transferring the concavo-convex pattern to a place positioned with respect to a predetermined punching shape. COPYRIGHT: (C)2008,JPO&INPIT
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