| 摘要 |
A fabrication method of an electronic device is provided. First, a substrate is provided. Then, a patterned amorphous carbon (alpha-C) layer is formed on the substrate and exposes part of the substrate. Next, a first alpha-C layer covering the patterned alpha-C layer and part of the substrate is formed. Then, part of the substrate and part of the first alpha-C layer covering part of the substrate are removed, so as to form a patterned substrate and a second alpha-C layer.
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