| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type optical device capable of causing a laser beam to scan with high accuracy in a simple configuration. SOLUTION: The device includes: a light source device 11 emitting a laser beam; an electro-optical element 21 that allows the laser beam emitting from the light source device 11 to scan a projection object face by changing the refractive index distribution corresponding to the intensity of an electric field generated inside; and a diameter variable optical system having a condensing element 26 that condenses the laser beam exiting from at least the electro-optical element 21 and has different condensing rates along the electric field direction of the electro-optical element 21, and the optical system varying a beam diameter of the laser beam. COPYRIGHT: (C)2008,JPO&INPIT
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