| 摘要 |
PROBLEM TO BE SOLVED: To restrain the number of temperature sensors without impairing a degree of freedom for control, in a temperature controller for a fluid. SOLUTION: An estimation device 6 estimates an outlet temperature of the fluid in an outlet of a heating vessel 15a provided with no outlet temperature sensor. A control part 5 determines a control input based on the measured outlet temperature and a target temperature, in the heating vessel 15a provided with an outlet temperature sensor 16, and determines the control input based on the estimated temperature estimated by the estimation device 6 and the target temperature, in the heating vessel 15a provided with no outlet temperature sensor. COPYRIGHT: (C)2008,JPO&INPIT
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