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发明名称
具有提供电浆抗性之保护层的基材支撑件
摘要
本发明的实施例提供一种具有增强电浆耐受性之保护层的基材支撑组件。在一实施例中,一种基材支撑组件包括具有基材支撑上表面的静电吸盘、和设置在静电吸盘上的保护层,其中保护层系由含有稀土金属的陶质材料制成。
申请公布号
TW200816360
申请公布日期
2008.04.01
申请号
TW096128301
申请日期
2007.08.01
申请人
应用材料股份有限公司
发明人
孙珍妮佛Y SUN, JENNIFER Y.;周爱琳
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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