METHOD FOR THE PRODUCTION OF A THIN GLASSY COATING ON SUBSTRATES IN ORDER TO REDUCE GAS PERMEATION.

摘要

Disclosed is a method for producing a glassy, transparent coating on a substrate by coating the substrate with a solution containing a) a polysilazane of formula -(SiR'R"-NR'")_n-, wherein R', R", R'" are identical or different and independently represent hydrogen or an optionally substituted alkyl radical, aryl radical, vinyl radical, or (trialkoxysilyl)alkyl radical, n being an integer or being calculated such that the polysilazane has a number-average molecular weight ranging from 150 to 150,000 g/mol, and b) a catalyst in an organic solvent, and then removing the solvent using evaporation such that a polysilazane layer having a thickness of 0.05 to 3.0 ??m remains on the substrate, and irradiating the polysilazane layer with VUV radiation having wavelength portions < 230 nm and UV radiation having wavelength portions ranging between 230 and 300 nm in an atmosphere containing steam in the presence of oxygen, active oxygen, and optional nitrogen.