摘要 |
Method for controlling a high-voltage power supply generator for a magnetron (16) for producing a cold plasma inside a hollow body in order to carry out the deposition of a boundary layer within said hollow body, characterised in that it comprises selecting (E2) a generator operation mode from a plurality of operation modes (MODE 1, MODE 2, MODE 3), modifying the operation mode (MODE 1, MODE 2, MODE 3) of the generator by varying at least one coefficient ((a, b, c);(a1, b1, c1)) defining a maximal power P<SUB>max</SUB> of the waveform of the supply power of the magnetron (16) according to a set average power P<SUB>moy</SUB> of the magnetron (16), the magnetron (16) supply waveform being repeated recurrently with a cylic conduction ratio Th depending on the set average power P<SUB>moy</SUB> and/or on the maximal power P<SUB>max</SUB>. |
申请人 |
SIDEL PARTICIPATIONS;CHOMEL, NICOLAS;BOUTROY, NAIMA;CETINEL, ERTAN |
发明人 |
CHOMEL, NICOLAS;BOUTROY, NAIMA;CETINEL, ERTAN |