发明名称 METHOD AND DEVICE FOR THE COLD-PLASMA DEPOSITION OF A BOUNDARY LAYER AND MACHINE USING SUCH A DEVICE
摘要 Method for controlling a high-voltage power supply generator for a magnetron (16) for producing a cold plasma inside a hollow body in order to carry out the deposition of a boundary layer within said hollow body, characterised in that it comprises selecting (E2) a generator operation mode from a plurality of operation modes (MODE 1, MODE 2, MODE 3), modifying the operation mode (MODE 1, MODE 2, MODE 3) of the generator by varying at least one coefficient ((a, b, c);(a1, b1, c1)) defining a maximal power P<SUB>max</SUB> of the waveform of the supply power of the magnetron (16) according to a set average power P<SUB>moy</SUB> of the magnetron (16), the magnetron (16) supply waveform being repeated recurrently with a cylic conduction ratio Th depending on the set average power P<SUB>moy</SUB> and/or on the maximal power P<SUB>max</SUB>.
申请公布号 WO2008017780(A2) 申请公布日期 2008.02.14
申请号 WO2007FR51768 申请日期 2007.08.02
申请人 SIDEL PARTICIPATIONS;CHOMEL, NICOLAS;BOUTROY, NAIMA;CETINEL, ERTAN 发明人 CHOMEL, NICOLAS;BOUTROY, NAIMA;CETINEL, ERTAN
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