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发明名称
微影处理单元及器件制造方法
摘要
本发明揭示一种用于器件制造的双处理技术,其包括执行一第一图案化步骤以在一光阻层中形成孔径,在剥离该第一光阻层并藉由用于第二曝光之一第二光阻层取代该第一光阻层前填充该等孔径。在一具体实施例中,微影单元包括一整合的填充及/或剥离部件,且其可用于执行该上述技术。
申请公布号
TW200807163
申请公布日期
2008.02.01
申请号
TW096109937
申请日期
2007.03.22
申请人
ASML公司
发明人
史蒂芬 奇尔特 可路斯威可;约翰 杰拉德 里明
分类号
G03F7/20(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
陈长文
主权项
地址
荷兰
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