发明名称 Apparatus and method for supplying solid raw material to single crystal grower
摘要 The present invention relates to an apparatus and a method for supplying a solid raw material to a grower of silicon or germanium semiconductor single crystal. In the solid raw material supply apparatus including a cylindrical body mounted above a crucible for receiving the solid raw material therein, a bottom cover detachably installed in the lower end of the body and basically formed in the shape of a cone, and a connection means for relatively moving the bottom cover upwards and downwards with regard to the body, the conic bottom cover is made from the same material as a semiconductor to be grown to the single crystal and the solid raw material is charged while the bottom cover is spaced away from the melt in the crucible at a predetermined distance, thereby the bottom cover can be used repetitively, and even though the bottom cover is broken by shocks resulted from the fall of the solid raw material, fragments of the bottom cover do not contaminate the melt. Further, the present invention basically forms the bottom cover in the shape of a cone and variously changes or modifies the detailed shape and structure of the bottom cover, thereby preventing breakage of the bottom cover and uniformly dispersedly charging the solid raw material in the crucible.
申请公布号 KR100800212(B1) 申请公布日期 2008.02.01
申请号 KR20060073023 申请日期 2006.08.02
申请人 发明人
分类号 C30B15/00 主分类号 C30B15/00
代理机构 代理人
主权项
地址