| 摘要 |
PROBLEM TO BE SOLVED: To provide detecting agent capable of detecting germane and organic silicon compounds such as vinyltrimethylsilane, allylalkoxysilane, etc. discharged from a semiconductor manufacturing process, etc. with high sensitivity without being affected by atmospheric gas, such as hydrogen, etc. and preventing easy decrease of sensitivity due to light, etc. till its use. SOLUTION: This detecting agent is formed by supporting dichromate, such as ammonium dichromate, dichromate of alkaline metal, as a discoloring component on top of an inorganic carrier. Preferably, the detecting agent is formed by supporting noble metal salt together with dichromate on top of the inorganic carrier. COPYRIGHT: (C)2008,JPO&INPIT
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