| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a color filter inspection method for efficiently inspecting the irregularity of a color filter in a short time at a low cost by setting a non-cell region to an observation region of irregularity without being affected by a pixel or a moire, and a color filter inspection system. <P>SOLUTION: In the color filter inspection method, the non-cell region 5 of the color filter is irradiated with light (S2) and transmitted and/or reflected light is imaged by the non-cell region 5 to form an inspection image (S3). Then, the density distribution of the inspection image is compared with that of a reference image obtained by preliminarily imaging a substrate having no irregularity to detect the irregularity 3 of the non-cell region 5 (S4). <P>COPYRIGHT: (C)2008,JPO&INPIT |
