| 发明名称 |
METALLIC FILM-FORMING COMPOSITION AND METHOD FOR PRODUCING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a metallic film-forming composition capable of inhibiting developing deposits on the surface of metallic film after baking. SOLUTION: The metallic film-forming composition comprises a water-soluble polymer and a metal compound, wherein the content of metallic substances except the metal compound is 50 ppm or less. COPYRIGHT: (C)2008,JPO&INPIT
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| 申请公布号 |
JP2008013696(A) |
申请公布日期 |
2008.01.24 |
| 申请号 |
JP20060187625 |
申请日期 |
2006.07.07 |
| 申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
UEMATSU TERUHIRO;HARADA MITSUHARU;TAKANASHI HIROSHI |
| 分类号 |
C09D1/00;C09D7/12;C09D101/00;H01L21/288;H01L21/3205;H01L23/52 |
主分类号 |
C09D1/00 |
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