发明名称 LASER SCANNING APPARATUS AND LASER SCANNING MICROSCOPE
摘要 <p>Provided is a laser scanning apparatus wherein laser scanning conditions can be surely set while suppressing damages to a surface to be irradiated. A laser scanning microscope is also provided. The laser scanning apparatus is provided with a light deflecting means (11) arranged in an optical path of a laser beam traveling toward a surface to be scanned; user interfaces (21, 22, 23) for permitting user to specify the operation contents of the light deflecting means; generating means (201, 201A, 201B) for generating driving signals for the light deflecting means, corresponding to the specified operation contents; and testing means (112X, 112Y, 202, 201, 201A, 201B), which drive the light deflecting means by the driving signal on a trial basis, with the laser beam turned off, and measure the operation contents of the light deflecting means while driving the light deflecting means.</p>
申请公布号 WO2008010311(A1) 申请公布日期 2008.01.24
申请号 WO2007JP00656 申请日期 2007.06.20
申请人 NIKON CORPORATION;TSURUMUNE, ATSUSHI 发明人 TSURUMUNE, ATSUSHI
分类号 G02B21/00 主分类号 G02B21/00
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