| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for easily holding a passive sampler in a stable state inside of a substrate conveyance container for accommodating and storing, or conveying a plurality of substrates and a substrate in a manufacturing process, so as to simply and easily evaluate drag-in contaminations that is introduced into atmosphere inside the substrate conveyance container and occurs while the plurality of substrates where particulates and gaseous substances are attached during the manufacturing process are accomodated sequentially. SOLUTION: In a sampling plate to be accommodated in the substrate conveyance container, the sampling plate includes a holding means for holding the passive sampler on the sampling plate. In the sampling plate to be accommodated in the substrate conveyance container, the passive sampler is held on the sampling plate. COPYRIGHT: (C)2008,JPO&INPIT
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