发明名称 SLIT NOZZLE AND CHEMICAL-COATING APPARATUS HAVING THE SAME
摘要 <p>A slit nozzle and an apparatus for spraying chemical liquid having the same are provided to control the spraying speed of the chemical liquid sprayed from the slit nozzle by adjusting the thickness of a spacer. A slit nozzle includes first and second bodies(210,220), and a spacer(230). The first body includes a supplement hole, which is inputted chemical liquid. The second body is formed opposite to the first body. The spacer, which is installed between first and second bodies, is formed to be separated the first and the second bodies. The spacer includes an exhausting hole, which is connected with the supplement hole, between the first and the second bodies.</p>
申请公布号 KR100782539(B1) 申请公布日期 2007.12.06
申请号 KR20060053967 申请日期 2006.06.15
申请人 SEMES CO., LTD. 发明人 LEE, JUNG HWAN
分类号 H01L21/02;H01L21/027 主分类号 H01L21/02
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