发明名称 |
Apparatus and method for characterizing defects in a transparent substrate |
摘要 |
An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.
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申请公布号 |
US2007263206(A1) |
申请公布日期 |
2007.11.15 |
申请号 |
US20070729299 |
申请日期 |
2007.03.28 |
申请人 |
LEBLANC PHILIP ROBERT;SCHNEIDER VITOR MARINO;USTANIK CORREY ROBERT |
发明人 |
LEBLANC PHILIP ROBERT;SCHNEIDER VITOR MARINO;USTANIK CORREY ROBERT |
分类号 |
G01N21/47 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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地址 |
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