VAPOR DEPOSITION OF A LAYER

摘要

A method of depositing a layer onto a substrate, comprising heating an evaporator (40) to a temperature capable of completely evaporating the evaporant to be deposited, dispensing into the evaporator one or more quantized units of the evaporant where the evaporant is completely vaporized, providing an area vapor dispenser (60) having a plurality of apertures (90), and directing the vaporized evaporant from the evaporator to the area vapor dispenser so that the evaporant is dispensed through the apertures to deposit the layer on the substrate (10).