| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transparent conductive film for a photoelectric converter for effectively increasing the surface roughness without applying wet etching to the transparent conductive film and increasing the film thickness. <P>SOLUTION: The transparent conductive film for the photoelectric converter comprises zinc oxide including B atoms of 2×10<SP>19</SP>atoms/cm<SP>3</SP>or over, and H atoms of 2×10<SP>20</SP>atoms/cm<SP>3</SP>or over as the atomic density measured by the secondary ion mass spectrometry. A ratio of B atom density/H atom density is varied to have a minimum value at a prescribed position of the transparent conductive film in the thickness direction. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
