| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-treating apparatus capable of finely adjusting the inclination of a lamp house easily and safely. SOLUTION: In the heat-treating apparatus, the lamp house 5 is arranged on a chamber for storing wafers. The lamp house 5 is in a rectangular shape in a plan view, and incorporates a plurality of flash lamps 69 in a line. Worm gears 10 are provided at four corners of the rectangle of the lamp house 5 each. Each worm gear 10 adjusts the distance between the lamp house 5 and the chamber at its installation position. A dial gauge 20 is provided at each of four corners of the lamp house 5. By confirming the dial gauge 20 and individually operating the four worm gears 10 from the outside of an outer panel 2, the inclination of the lamp house 5 to the chamber can be adjusted finely, easily, and safely. COPYRIGHT: (C)2008,JPO&INPIT
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