Production of epitaxial films,申请号US19610143882-传众专利搜索

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发明名称	Production of epitaxial films
摘要
申请公布号	US3261726(A)	申请公布日期	1966.07.19
申请号	US19610143882	申请日期	1961.10.09
申请人	MONSANTO COMPANY	发明人	RUEHRWEIN ROBERT A.
分类号	H01L21/34;H01L21/365;H01L31/18	主分类号	H01L21/34
代理机构		代理人
主权项
地址

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