| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a highly reliable capacitor. <P>SOLUTION: This method of manufacturing a capacitor 100 includes a step of forming a nickel acid lanthanum layer 42 on the upper part of a substrate 1, a step of forming a dielectric layer 5 on the upper part of the nickel acid lanthanum layer 42, a step of forming a conductive layer 60 on the upper part of the dielectric layer 5, and a patterning step of etching at least the dielectric layer 5 until the nickel acid lanthanum layer 42 is exposed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
