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发明名称
METHOD OF HEAT TREATMENT AND HEAT TREATMENT APPARATUS
摘要
申请公布号
KR100748820(B1)
申请公布日期
2007.08.13
申请号
KR20057012772
申请日期
2005.07.08
申请人
发明人
分类号
H01L21/324;H01L21/768;H01L21/00;H01L21/22;H01L21/31;H01L23/522
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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