| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement probe which performs four-terminal measurement by securely brought into contact with a measurement object with a simple structure even in a flip chip surface where a high-density wiring pattern is formed, and also to provide its manufacturing method and measurement device. SOLUTION: The measurement probe is provided with first and second probe parts each having a contact part brought into contact with the measurement object for measuring the resistance value of the measurement object, wherein one probe is used for voltage measurement and the other is used for application of a current. In the measurement probe, the second probe part includes: a body part formed so as to surround the first probe part; a head part including the contact part; and an energizing means so that the head part resiliently energizes the contact part of the first probe part to be protected in the axial direction. The contact part of the head part when unused is at a position projecting more than that of the first probe part. COPYRIGHT: (C)2007,JPO&INPIT
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