| 摘要 |
PROBLEM TO BE SOLVED: To transfer signal charge at high transfer efficiency even in low voltage driving and rapid driving by restraining depression of electric potential generated under a gap between charge transfer electrodes. SOLUTION: After a second insulating film 107 is formed on a first layer charge transfer electrode 105, a second insulating film 107 is removed to be thin only in a horizontal transfer part 100A wherein low voltage driving and rapid driving are required and is made a second insulating film 107A, and a second layer charge transfer electrode 108 is formed thereafter. In the horizontal transfer part 100A, a gap between charge transfer electrodes 105, 108 which causes charge transfer failure can be made small in this way. COPYRIGHT: (C)2007,JPO&INPIT
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