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发明名称
Vorrichtung zur Erzeugung eines Plasmas mit Entladung entlang einer magnetisch-neutralen Linie
摘要
申请公布号
DE69737311(T2)
申请公布日期
2007.06.28
申请号
DE19976037311T
申请日期
1997.02.06
申请人
ULVAC INC.
发明人
UCHIDA, TAIJIRO
分类号
H05H1/46;H01J37/32
主分类号
H05H1/46
代理机构
代理人
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地址
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