APPARATUS AND METHOD FOR POLISHIING,申请号KR20017008650-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR POLISHIING
摘要
申请公布号	KR100729022(B1)	申请公布日期	2007.06.14
申请号	KR20017008650	申请日期	2001.07.07
申请人		发明人
分类号	B24B37/04;B24B37/14;B24B37/27;H01L21/304	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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