| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element measuring tool capable of holding highly accurately an optical element which is a measuring object, and performing decentering measurement in a shape measuring device. SOLUTION: In this optical element measuring tool 10, since three spherical parts 30 are biased onto a fringe part PA of the optical element OE on a substrate 20 and allowed to abut thereon by an outer shape reference detection means 40, the outer shape reference of the optical element OE can be measured accurately. In this case, since the abutting portion which is constituted of the spherical parts has a shape processable easily with high accuracy, measurement accuracy can be heightened furthermore. COPYRIGHT: (C)2007,JPO&INPIT
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