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发明名称
METHOD FOR FORMING MICROSTRUCTURES ON A SUBSTRATE USING A MOLD
摘要
申请公布号
EP1449228(B1)
申请公布日期
2007.06.06
申请号
EP20020763435
申请日期
2002.08.09
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
CHIU, RAYMOND, C.;DILLON, KENNETH, R.
分类号
H01J9/02;H01J9/24;B29C33/38;B29C33/42;B29C43/22;B29C59/04;B29D11/00;B32B3/00;B32B27/00;C03C17/00;C03C17/22;H01J11/02
主分类号
H01J9/02
代理机构
代理人
主权项
地址
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