PIEZOELECTRIC RF MEMS DEVICE AND THE METHOD FOR PRODUCING THE SAME

摘要

A piezoelectric RF MEMS device and a method for producing the same are provided to stabilize the operation of the piezoelectric RF MEMS device and to realize as a single package of a simple structure. A piezoelectric RF MEMS device(100) includes a top substrate(110), a bottom substrate(120), and a piezoelectric actuator(130). The top substrate includes an RF output signal line(111). The piezoelectric actuator is positioned at a bottom of the RF output signal line. The bottom substrate forms a cavity to separate one end of the piezoelectric actuator from other end. An RF input signal line is formed on top of the piezoelectric actuator. A connecting pad connects the RF signal line electrically by being contacted to the RF output signal line when the piezoelectric actuator is operated upward.