| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of enhancing a spatial resolution of a scanning microscope image. SOLUTION: This inspection method concerned in the present invention includes a detector 130 for emitting a modulated laser beam modulated, based on a modulation signal synchronized with a reference signal, as a laser beam, to an IC chip 110, and for receiving a magnetic field signal from a fluxmeter 120 to extract a signal of a frequency component same to that of a modulation frequency, and a means 140 for displaying an image of a magnetic field distribution, based on the detected signal, and the a frequency of the modulation signal is higher than 100 kHz. COPYRIGHT: (C)2007,JPO&INPIT
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