| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope equipped with a light source image detection optical system capable of reducing the light intensity of a light source image with a simple constitution without increasing the number of components, and wherein, the light source can be easily positioned with desired accuracy without causing eye strain. SOLUTION: The ultraviolet microscope 100 includes: a dichroic mirror 13 as a light branching means arranged in an illuminating optical system 4 so as to extract non-illuminating light of wavelength region different from that of the illuminating light out of the light emitted from the light source 11 and branches the extracted light outside the illuminating optical system 4; and a light source image forming optical system 6 including a diaphragm 23a as a passing light dimming means having an aperture for limiting the passing area of the non-illuminating light, and a low reflection mirror 20 as a reflecting/dimming means having a reflection surface 20a for limiting the reflection quantity of the non-illuminating light, and for forming the light source image for detecting the installation position of the light source 11 to the incident pupil 3a of an objective lens 3 on an observation surface 22a as the conjugate surface of the incident pupil 3a with the dimmed non-illumination light. COPYRIGHT: (C)2007,JPO&INPIT
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