| 摘要 |
An apparatus for depositing a thin film capable of controlling separation of ionized organic material vapor by an electric field so that an organic material is deposited on a substrate and a method of depositing a thin film using the same are disclosed. The apparatus for depositing the thin film includes a vacuum chamber whose inside remains vacuous, a substrate holder for supporting a substrate on which a deposition material is to be deposited in the vacuum chamber, and a deposition source provided to face the substrate to accommodate, heat, and evaporate the deposition material. The deposition source includes an ionization device for ionizing the deposition material and electric field generating devices for separating the vapor of the ionized deposition material by an electric field. Therefore, it is possible to reduce the amount of use of the deposition material and to deposit the organic material on the substrate at high speed.
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