| 摘要 |
<p>A wafer transfer pad is provided to suppress loss of production by preventing a breakdown of a wafer to be transferred to a pad part. A shift part(10) is installed inside a pad part(2). A plurality of wafers(4) are loaded into a cassette plate. The shift part comes in contact with one side of the wafer of the cassette plates in an elevating state of the cassette plate. The shift part includes a first shift(12) having a projection(11), a second shift(14) connected with the first shift, and a third shift(16) shifted to a rotating direction of the second shift. A first rotary shaft is installed at a connective part between the first and the second shifts. A second rotary shaft(15) is installed at a connective part between the third and the second shifts.</p> |
