| 摘要 |
An angular rate sensor has a pair of masses located symmetrically with respect to a point on the xy-plane, a support beam connected to each of the masses so as to be substantially movable in a direction, a center anchor supporting the support beam at the point, a floating body having a plurality of slits and located symmetrically with respect to the point, and a pair of displacement detecting elements located in the slits to detect rotational vibration about the point when an angular rate occurs. A connecting beam is located symmetrically with respect to the point, and driving electrodes vibrate in an anti-phase manner. |
