| 摘要 |
PROBLEM TO BE SOLVED: To provide a triangular survey system light measuring system for obtaining always highly precise measuring results by eliminating influence expanded and contracted by an optical system support due to change of a temperature environment. SOLUTION: The light measuring system is provided with a temperature detection part 30 for measuring temperature of a base plate 11 for supporting two optical systems (a projection system 20A and an observation system 20B), and a base line length calculation part 43 for finding a real length of a base line under measured temperature on the basis of a linear expansion coefficient of a material forming the measured temperature and the base plate 11. A calculation analysis part 42 substitutes an initial set value of the base line length with a real length value of the base line found in a reference length calculation part 43, and performs calculation based on a position relationship of the real length of the base line and a point to be observed to analyze a three-dimensional shape of a specimen by using observation data obtained from the optical systems. COPYRIGHT: (C)2007,JPO&INPIT
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