发明名称 ION IMPLANTING METHODS
摘要 <p>An ion implanting method includes forming a pair of spaced and adjacent features projecting outwardly from a substrate. At least outermost portions of the pair of spaced features are laterally pulled away from one another with a patterned photoresist layer received over the features and which has an opening therein received intermediate the pair of spaced features. While such spaced features are laterally pulled, a species is ion implanted into substrate material which is received lower than the pair of spaced features. After the ion implanting, the patterned photoresist layer is removed from the substrate. Other aspects and implementations are contemplated.</p>
申请公布号 WO2007001712(A1) 申请公布日期 2007.01.04
申请号 WO2006US20600 申请日期 2006.05.25
申请人 MICRON TECHNOLOGY, INC. 发明人 CULVER, RANDALL;MCDANIEL, TERRENCE, B.;WANG, HONGMEI;DALE, JAMES, L.;LANE, RICHARD, H.;FISHBURN, FRED, D.
分类号 H01L21/266;H01L21/265 主分类号 H01L21/266
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