发明名称 Uniform cavitation for particle removal
摘要 Systems and methods for promoting a substantially uniform cavitation field. With system ( 100 ) including a diaphragm ( 109 ) dividing a container ( 103 ), a second energy pulse corresponding to a first energy pulse arising from collapse of a cavity C is produced and is used to determine whether to adjust a corresponding transducer 121 -k. In system ( 16 ), a cavity creating unit ( 11 ), including an assembly of transducers 15 -i, is moveable from a test liquid to a particle removal (PR) liquid after transducer testing. In another system, a sensor plate ( 170 ) having an array of sensors 171 -j provides a virtual wafer. A substantially uniform field of cavitation may be maintained by a cavity enhancement liquid, or adjustment of transducer energy. Mechanisms of holding an object produce substantially uniform cavitation. Opposed transducers in a container having monotonically decreasing and/or increasing cavitation density produce substantially uniform cavitation density.
申请公布号 US2006290235(A1) 申请公布日期 2006.12.28
申请号 US20040559894 申请日期 2004.06.03
申请人 FERRELL GARY W;SCHIPPER JOHN F;RATRA JAGJIT S 发明人 FERRELL GARY W.;SCHIPPER JOHN F.;RATRA JAGJIT S.
分类号 H01L41/02;B08B3/12;H01L21/00 主分类号 H01L41/02
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