METHOD FOR MANUFACTURING HUMIDITY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a humidity sensor which has a humidity-sensitive membrane made of a polymer membrane and can prevent its sensitivity from varying by responding to various operation environments. SOLUTION: The method for manufacturing the humidity sensor comprises a first heat treatment step of heat-treating the polymer membrane applied on a substrate at a temperature not less than its glass transition point and a second heat treatment step of heat-treating the polymer membrane which is treated by the first heat treatment step at a temperature not more than the glass transition point under a prescribed humidity atmosphere. COPYRIGHT: (C)2007,JPO&INPIT