| 摘要 |
A transparent pellicle member ( 1 ), comprising an inner or central portion ( 1 A) and an out peripheral portion ( 1 B) mounted across a reticle for use in semiconductor chip fabrication, substantially parallel thereto and with a space ( 9 ) therebetween. The central portion ( 1 A) of the pellicle ( 1 ) is fixed with regard to position and tilt angle to the reticle base plate ( 5 ) by means of one or more anchors ( 50 ). The outer or peripheral portion ( 1 B) of the pellicle ( 1 ) is separate from the central portion (IA). It is connected on each side to the central portion ( 1 A) and to a frame ( 3 ) by means of flexible connectors ( 30 ), which are sufficiently flexible to permit movement of the peripheral portion ( 1 B) of the pellicle membrane in a direction perpendicular to the reticle, but is sufficiently resistant to movement thereof in other directions. As a result, the gas pressure difference between the space ( 9 ) and the surrounding atmosphere supports the outer portion ( 1 B) of the pellicle ( 1 ) using the weight of that portion of the pellicle ( 1 ) itself. As a result of the "floating" portion ( 113 ), a pressure difference is created which is required to avoid deflection of the inner portion ( 1 A).
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