| 发明名称 |
Method for the removal of organic residues from finely structured surfaces |
| 摘要 |
Method for removing of organic residues from finely structured surfaces, characterized in that the residues are incinerated by means of ozone.
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| 申请公布号 |
US2006272680(A1) |
申请公布日期 |
2006.12.07 |
| 申请号 |
US20060507283 |
申请日期 |
2006.08.21 |
| 申请人 |
TECHNOTRANS AG |
发明人 |
OEHLER MICHAEL;KOSTERS RAINER |
| 分类号 |
B08B7/00;B08B3/00;B08B5/04;F23J1/00;G03F7/42 |
主分类号 |
B08B7/00 |
| 代理机构 |
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