发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device is provided to sufficiently obtain a bonding region required for a bonding process by forming a measuring unit adjacent to a bonding pad for measuring a size and/or position of a probe mark. A bonding pad(120) is formed on at least one surface of a semiconductor chip(110). A measuring unit(150) is formed to be adjacent to the bonding pad. The measuring unit measures a size and/or position of a probe mark(130) formed on the bonding pad. The bonding pad is extended to a predetermined direction. The measuring unit includes at least one measuring height(150a). The measuring height is formed to be separated from a predetermined direction in parallel with the extended direction at a predetermined interval. The bonding pad includes a first protective layer pattern and a second protective layer pattern. The first protective layer pattern is formed on the semiconductor chip and exposes the bonding pad. The second protective layer pad is formed on the first protective layer, has a measuring height region, and exposes the bonding pad.
申请公布号 KR20060125314(A) 申请公布日期 2006.12.06
申请号 KR20050047304 申请日期 2005.06.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KWON, DONG KYUN
分类号 H01L21/60;H01L21/66 主分类号 H01L21/60
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