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发明名称
Transfer-chamber
摘要
申请公布号
USD527751(S1)
申请公布日期
2006.09.05
申请号
US20040217729F
申请日期
2004.11.22
申请人
TOKYO ELECTRON LIMITED
发明人
KONDOH KEISUKE;OKA HIROKI;NARUSHIMA HIROSHI
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