| 摘要 |
In a method for electronic image rectification in pixel-by-pixel scanning of a substrate by a bundled electromagnetic beam, the pixels are read out one after the other in readout intervals of constant predetermined duration. In order to improve image quality, the deviation between a reference scanning movement and an actual scanning movement carried out on the reference substrate is initially determined in a calibration process, for example, by a reference substrate with a known geometric surface structure. Depending on this deviation, a delay interval is determined for a pixel and the start of the readout interval of this pixel or of the subsequent pixel is delayed by this delay interval. The information about the delay interval is stored. In an analysis process for examining a substrate, the stored information about the delay interval is accessed for the pixel, and the delay interval is added before or after the readout interval.
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