| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor circuit capable of shortening a refresh time of an operational amplifier 41 in a charge amplifying circuit. <P>SOLUTION: A switch 49 is connected in parallel to a capacitor 42 connected between an inversion input terminal and an output terminal of the operational amplifier 41, and the switch 49 is turned on when refreshed. In this constitution, a continuity condition is attained between the inversion input terminal and the output terminal of the operational amplifier 41 by turning on the switch 49, and the operational amplifier 41 is off-set irrespective of time constants of a MOS resistance 43 and the capacitor 42. The operation amplifier 41 is thereby off-set in a short time, and a time is saved when a wafer is inspected. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
