OPTICAL THIN FILM AND FILM FORMING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a film forming method of a transparent conductive substance capable of coping with a delicate change of conditions at a vacuum evaporation method. SOLUTION: The optical thin film is a transparent multi-layered film formed on a transparent substrate, including a thin film of a transparent conductive substance. The multi-layered film includes at least one slanted refractive index film in which the refractive index of the thin film composed of the transparent conductive substance continuously changes in a range of 1.9 to 2.15 in film thickness direction, and the surface resistance of the multi-layered film is 1×108Ω/SQUARE. COPYRIGHT: (C)2006,JPO&NCIPI