发明名称 |
CAPACITIVE PICK-OFF AND ELECTROSTATIC REBALANCE ACCELEROMETER HAVING EQUALIZED GAS DAMPING |
摘要 |
A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element. |
申请公布号 |
EP1685413(A1) |
申请公布日期 |
2006.08.02 |
申请号 |
EP20040811564 |
申请日期 |
2004.11.19 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
ESKRIDGE, MARK, H.;MALAMETZ, DAVID, L. |
分类号 |
G01P15/125;G01P15/08 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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